Vitaly Kuzmenko

Часть публикаций из профиля, по году от новых к старым. Это не полный список последних работ автора; работы без года — в конце.

• On relationships between gas-phase and heterogeneous process kinetics in CF4 + H2 + Ar plasma2025
• Comparative study of Ar- and He-rich SF6 + Ar + He plasmas for dry etching applications: Diagnostics and kinetic modeling2025
• Spectroscopy and Actinometry of Halogen-Containing Inductively Coupled Plasma for Anisotropic Etching2025 · аннотациясвернуть

  The parameters of halogen-containing inductively coupled plasma of CF4, CF3Br, and C2F4Br2 gases were investigated with the main focus on the study of optical emission spectra of plasma. The results of actinometry…

• PLASMA PARAMETERS AND FLUORINE ATOM DENSITY IN SF6 + Ar + He GAS MIXTURE: EFFECTS OF Ar/He MIXING RATIO, PRESSURE AND INPUT POWER2025
• Formation of Black Silicon in a Process of Plasma Etching with Passivation in a SF6/O2 Gas Mixture2024 · аннотациясвернуть

  This article discusses a method for forming black silicon using plasma etching at a sample temperature range from -20 °C to +20 °C in a mixture of oxygen and sulfur hexafluoride. The surface morphology of the resulting…

• Revealing the controlling mechanisms of atomic layer etching for high-k dielectrics in conventional inductively coupled plasma etching tool2024
• Gas Phase Composition and Kinetics of Fluorine Atoms in SF6 Plasma2024
• Selective atomic layer etching of Al2O3, AlNx and HfO2 in conventional ICP etching tool2022