D. V. Lopaev

Часть публикаций из профиля, по году от новых к старым. Это не полный список последних работ автора; работы без года — в конце.

• Nanostructured Etching of Ruthenium in Three-Component Cl2/O2/Ar Plasma2025
• Si and SiO2 sputtering by low-energy Ne+ ions in plasma conditions2025
• Surface Recombination of H Atoms on Pyrex in Medium-Pressure Hydrogen Plasma2025
• VUV radiation impact on O(3P) atom surface loss on Pyrex in DC discharge in mixtures of O2 with Ar, Kr and Xe2025
• Determination of the molar fraction of metastable oxygen molecules in the O2 discharge using optical emission spectroscopy.2024
• Actinometry of O, N and F atoms2017 · аннотациясвернуть

  Abstract The applicability of actinometry for measuring the absolute concentration of O, N and F atoms in discharge plasma was studied. For this purpose, concentrations of these atoms were measured downstream of an ICP…

• Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source2015
• Singlet oxygen generation in O2flow excited by RF discharge: I. Homogeneous discharge mode: α-mode2005 · аннотациясвернуть

  The production and transport dynamics of O 2 ( a 1 Δ g ) and molecules as well as O( 3 P) atoms has been studied in an O 2 flow excited by a 13.56 MHz RF discharge in a quartz tube at pressures of 1–20 Torr. It has been…